An Integrated Sensor for Electrochemical Measurements
- 1 February 1986
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Biomedical Engineering
- Vol. BME-33 (2) , 83-90
- https://doi.org/10.1109/tbme.1986.325881
Abstract
A method for the fabrication of a completely integrated solid-state electrochemical sensor which combines a minature liquid junction reference electrode with a CMOS ISFET is presented. The reference electrode is fabricated by preferentially etching silicon to form a porous silicon frit. The CMOS process provides electrical encapsulation of the ISFET. The performance of the reference electrode and CMOS ISFET as an integrated sensor is demonstrated.Keywords
This publication has 22 references indexed in Scilit:
- Electrically free-standing IrOitx thin film electrodes for high temprature, corrosive environment pH sensingSensors and Actuators, 1983
- Operation of chemically sensitive field-effect sensors as a function of the insulator-electrolyte interfaceIEEE Transactions on Electron Devices, 1983
- Study of the Orientation Dependent Etching and Initial Anodization of Si in Aqueous KOHJournal of the Electrochemical Society, 1983
- A critical evaluation of the mechanism of potential response of antigen polymer membranes to the corresponding antiserumAnalytica Chimica Acta, 1982
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Kinetics and drift of gate voltages for electrolyte-bathed chemically sensitive semiconductor devicesIEEE Transactions on Electron Devices, 1982
- Prototype sodium and potassium sensitive micro ISFETSSensors and Actuators, 1981
- An implantable ion sensor transducerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1981
- Methods of isfet fabricationSensors and Actuators, 1981
- A field effect transistor as a solid-state reference electrodeAnalytica Chimica Acta, 1978