Two Selective Etching Solutions for GaAs on InGaAs and GaAs / AlGaAs on InGaAs

• 1 September 1990
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 137  (9) , 2912-2914
• https://doi.org/10.1149/1.2087098

Abstract