Thermoelastic deformations of masks for deep X-ray lithography
- 28 February 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 27 (1-4) , 513-516
- https://doi.org/10.1016/0167-9317(94)00156-o
Abstract
No abstract availableKeywords
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- Three-dimensional microfabrication using synchrotron radiationNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1991
- Thermoelastic effects in x-ray lithography masks during synchrotron storage ring irradiationMicroelectronic Engineering, 1990
- Thermal effects in x-ray masks during synchrotron storage ring irradiationJournal of Vacuum Science & Technology B, 1989