Spectroscopic Investigations of Some Halide Reactions in Plasma-Generating Devices
- 1 January 1966
- journal article
- research article
- Published by SAGE Publications in Applied Spectroscopy
- Vol. 20 (1) , 18-25
- https://doi.org/10.1366/000370266774386326
Abstract
The behaviors of some halides of carbon (CF4, CCl4, CF3Cl, and Teflon), silicon (SiF4 and SiCl4), and boron (BF3) in plasma reactors have been investigated by emission spectroscopy. The emission spectra from these compounds have been identified and arise from excited diatomic molecules SiF, SiO, BO, C2, and CN and excited atoms of Si, B, and C. On the basis of the observed spectra and energetic and thermodynamic arguments, it is concluded that dissociation, excitation, and/or ionization processes requiring 25–30 eV are predominant in the plasma reactors under the experimental conditions of these studies.Keywords
This publication has 39 references indexed in Scilit:
- Some Observations on the Spectra of the Diatomic Fluorides of Silicon, Germanium, Tin, and LeadProceedings of the Physical Society, 1959
- The Band Spectrum of Silicon Monofluoride, SiFProceedings of the Physical Society, 1958
- Emission spectra from mixtures of atomic nitrogen and organic substancesSymposium (International) on Combustion, 1958
- Studies of chlorine trifluoride flamesProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1955
- A Note on the Ultra-Violet Band Spectra of CCl and SiClProceedings of the Physical Society. Section A, 1954
- A New Ultra-Violet Band-System of SiFProceedings of the Physical Society. Section A, 1951
- Silicon Flame BandsNature, 1947
- A spectroscopic investigation of hydrocarbon flamesProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1941
- Ultra-violet band-systems of SiClProceedings of the Physical Society, 1936
- On the band-spectra of silicon oxide and chloride, and chlorides of carbon, boron, and aluminiumProceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 1924