Summary Abstract: Structural consequences of ion assisted deposition

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 2922-2924
• https://doi.org/10.1116/1.573661

Abstract

Keywords

• SUMMARY ABSTRACT
• ION ASSISTED
• ASSISTED DEPOSITION
• STRUCTURAL CONSEQUENCES