Ferroelectric-based microactuators
- 1 November 1995
- journal article
- research article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 11 (1) , 179-190
- https://doi.org/10.1080/10584589508013590
Abstract
This paper reviews the current state of ferroelectric-based microactuators. The advantages of ferroelectric-based microactuation are considered. Several actuator concepts are discussed including unimorph-based cantilever actuators, membrane-based micropumps, linear positioning actuators using folded geometries of cascaded elementary actuators for both in-plane and out-of-plane displacements, linear stepper motors using inch-worm geometries, and ultrasonic-based micromotors. Optimistic, order-of-magnitude estimates of actuator performance are given based on simple, idealized analysis. Processing issues in fabricating ferroelectric-based microactuators are also considered.Keywords
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