Abstract
We present a brief summary of a general approach to calculate, in the kinematic approximation, angular profiles of LEED beams that allows a quantitative evaluation of finite-size effects in overlayers adsorbed with arbitrary unit mesh [including p(1×1)] on arbitrary substrates. The calculation includes realistic atomic scattering factors and electron beam attenuation. The procedure is general in that an evaluation of correlation functions for arbitrary distributions of overlayer atoms is possible. The method can also be used to estimate overlayer z-spacings. A comparison is made with experimental results for GaAs(110) p(1×1)-Sb.

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