Silicon microsystems

• 30 April 1993
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 21  (1-4) , 445-458
• https://doi.org/10.1016/0167-9317(93)90109-i

Abstract

Keywords

• PACKAGING
• MICROSYSTEMS
• MICROSYSTEM TECHNOLOGY
• COMPLEX SYSTEMS
• SILICON
• NEW
• TECHNOLOGY INTRODUCES