Numerical analysis of oxygen transport in magnetic Czochralski growth of silicon
- 1 November 1987
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 85 (1-2) , 69-74
- https://doi.org/10.1016/0022-0248(87)90205-3
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Effects of an external magnetic field on solute distribution in Czochralski grown crystals — a theoretical analysisJournal of Crystal Growth, 1986
- Czochralski crystal growth in an axial magnetic field: effects of Joule heatingJournal of Crystal Growth, 1983
- Czochralski Silicon Crystal Growth in the Vertical Magnetic FieldJapanese Journal of Applied Physics, 1982
- Computer simulation of heat, mass and fluid flows in a melt during czochralski crystal growthComputer Methods in Applied Mechanics and Engineering, 1980