O.M. v.p.e. growth of AlGaSb and AlGaAsSb

1 January 1980

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 16 (23) , 892-893
https://doi.org/10.1049/el:19800636

Abstract

The epitaxial growth of AlGaSb and AlGaAsSb alloys by o.m. v.p.e. is reported. The growth technique and the dependence of the alloy composition on the input flux of gases are discussed.

Keywords

ALGASB
VPE
ALGAASSB
GROWTH TECHNIQUE
ORGANOMETALLIC VAPOUR PHASE EPITAXY