Simple electron beam evaporator for aluminum
- 1 June 1976
- journal article
- letter
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 47 (6) , 778-779
- https://doi.org/10.1063/1.1134742
Abstract
Aluminum surfaces evaporated from Ta or W baskets are partially oxidized. The contamination of the aluminum surfaces could be reduced by electron beam evaporation. The assembly used by us is described in this paper.Keywords
This publication has 2 references indexed in Scilit:
- Auger and other characteristic energies in secondary electron spectra from Al surfacesSurface Science, 1971
- Identification of Auger spectra from aluminumSurface Science, 1971