Laser-induced-fluorescence detection of SO and SO2 in SF6/O2 plasma-etching discharges
- 15 July 1990
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 68 (2) , 505-511
- https://doi.org/10.1063/1.346820
Abstract
Laser‐induced‐fluorescence spectroscopy was used to detect SO and SO2 molecules in the active volume of 13.56‐MHz discharges through mixtures of sulfur hexafluoride and oxygen. A KrF laser was used to excite the SO B3Σ state and the SO2B̃1B1 and C̃1B2 states. 235‐nm light was used to directly monitor the ground‐state densities of these molecules. For a 100‐W discharge through a 12.5% oxygen mixture (42 sccm SF6, 6 sccm O2, 340‐mTorr total pressure), the SO and SO2 densities were determined to be ∼2×1014/cm3 and ∼4×1013/cm3, respectively. For the same discharge conditions, the SO vibrational temperature was ∼880 K. The SO vibrational temperature was independent of oxygen content in our experiments.This publication has 32 references indexed in Scilit:
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