Grain boundary diffusion of phosphorus in polycrystalline silicon

• 1 May 1982
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 21  (1) , 19-22
• https://doi.org/10.1116/1.571713

Abstract

Keywords

• GRAIN BOUNDARY DIFFUSION
• PHOSPHORUS
• POLYCRYSTALLINE SILICON