Fabrication of optical waveguides by ion‐beam sputtering

• 1 January 1976
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 13  (1) , 104-106
• https://doi.org/10.1116/1.568872

Abstract

Keywords

• OPTICAL WAVEGUIDES
• BEAM SPUTTERING
• FABRICATION OF OPTICAL
• WAVEGUIDES BY ION