Monolayer-Mediated Patterning of Integrated Electroceramics

• 1 January 1999
• journal article
• Published by Springer Nature in Journal of Electroceramics
• Vol. 3  (2) , 163-172
• https://doi.org/10.1023/a:1009947211056

Abstract

Keywords

• PZT
• THIN LAYERS
• FUNCTIONALIZED
• ELECTRICAL
• OXIDE THIN
• PATTERNED OXIDE
• PATTERN SUCH ELECTROCERAMIC THIN
• PATTERNED ELECTROCERAMIC THIN FILMS