Phase identification in a scanning electron microscope using backscattered electron Kikuchi patterns

1 May 1996

journal article
Published by National Institute of Standards and Technology (NIST) in Journal of Research of the National Institute of Standards and Technology

Vol. 101 (3) , 301-308
https://doi.org/10.6028/jres.101.031

Abstract

Backscattered electron Kikuchi patterns (BEKP) suitable for crystallographic phase analysis can be collected in the scanning electron microscope (SEM) with a newly developed charge coupled device (CCD) based detector. Crystallographic phase identification using BEKP in the SEM is unique in that it permits high magnification images and BEKPs to be collected from a bulk specimen. The combination of scanning electron microscope (SEM) imaging, BEKP, and energy dispersive x-ray spectrometry holds the promise of a powerful new tool for materials science.

Keywords

KIKUCHI PATTERNS
ELECTRON DIFFRACTION
SCANNING ELECTRON MICROSCOPY

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