Water Vapor as an Etchant for Silicon

• 1 January 1964
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 111  (11) , 1306-15C
• https://doi.org/10.1149/1.2425991

Abstract

Keywords

• ETCHANT FOR SILICON
• WATER VAPOR AS AN ETCHANT