Scanning Electron Induced Desorption Study of Surface Fluorine Migration

• 1 January 1974
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 13  (S2)
• https://doi.org/10.7567/jjaps.2s2.189

Abstract

Keywords

• SURFACE FLUORINE
• ELECTRON INDUCED
• INDUCED DESORPTION
• FLUORINE MIGRATION
• DESORPTION STUDY
• SCANNING