Preparation of X-Ray Lithography Masks with Large Area Sandwich Structure Membrane

• 1 August 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (8) , 1447-1448
• https://doi.org/10.1143/jjap.17.1447

Abstract

Keywords

• SANDWICH STRUCTURE
• LITHOGRAPHY MASKS
• RAY LITHOGRAPHY
• AREA SANDWICH
• MEMBRANE
• PREPARATION OF X