Investigation of bulk and interfacial properties of Ba0.5Sr0.5TiO3 thin film capacitors

1 June 1998

journal article
research article
Published by AIP Publishing in Applied Physics Letters

Vol. 72 (22) , 2820-2822
https://doi.org/10.1063/1.121495

Abstract

In this letter, we report the results for capacitance versus frequency measurements on a set of Ba0.5Sr0.5TiO3 (BST) capacitors with platinum electrodes (Pt) and varying BST film thicknesses. The study shows that Pt/BST interfacial capacitance is independent of frequency whereas the bulk dielectric constant has a power law dependence on frequency. Also, the bulk dielectric constant is observed to decrease whereas the interfacial capacitance increases with increasing temperature. In addition, we report the dependence of dielectric dispersion on BST film thickness and temperature. Calculations are performed which provide insights into the observed dispersion effects.

Keywords

This publication has 2 references indexed in Scilit:

A review of high dielectric materials for DRAM capacitors
Integrated Ferroelectrics, 1997
Dielectric Relaxation of (Ba, Sr)TiO₃ Thin Films
Japanese Journal of Applied Physics, 1995