Inhomogeneous carbon bonding in hydrogenated amorphous carbon films
- 15 April 1987
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 61 (8) , 2874-2877
- https://doi.org/10.1063/1.337883
Abstract
Hard-carbon films prepared by the rf-plasma decomposition of acetylene have been investigated by high-resolution 13C nuclear magnetic resonance spectroscopy, x-ray photoelectron spectroscopy (XPS), and the H(15Nα,γ)C nuclear resonant reaction. It was found that the ratio of sp2:sp3 bound carbon was 1.6, and that virtually all sp3 carbon atoms are, in fact, bound to one or more hydrogen atoms. Bulk layers contain about 40% hydrogen; however, results of the measurements of the hydrogen concentration, as well as those of XPS, confirm that the composition and properties of these carbon films are a strong function of their distance from the initial growth interface, and are spatially varying over the first 40 nm.This publication has 17 references indexed in Scilit:
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