Quantitative evaluation of sputtering induced surface roughness in depth profiling of polycrystalline multilayers using Auger electron spectroscopy
- 1 November 2003
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 444 (1-2) , 120-124
- https://doi.org/10.1016/s0040-6090(03)01112-x
Abstract
No abstract availableThis publication has 40 references indexed in Scilit:
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