Deep implantation of nitrogen into GaAs for selective three-dimensional microstructuring
- 1 October 1992
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 72 (7) , 2700-2704
- https://doi.org/10.1063/1.351519
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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