Effect of the dissolved hydrogen on the densification of synthetic silica glass under ArF excimer laser irradiation

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Abstract
The degree of densification-induced birefringence under ArF excimer laserirradiation decreases with increasing dissolved hydrogen concentration. The hydrogen concentration at the irradiation site was decreased after irradiation. Good correlation between the residual hydrogen and the degree of birefringence suggests that the birefringence change is due to the change in volume caused by the decrease in hydrogen. As with spontaneous decay, the rate at which hydrogen was released was proportional to the remaining hydrogen.