GaAs Quantum-Wire Laser Using Fractional Layer Superlattice
- 1 October 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (10R) , 4440-4445
- https://doi.org/10.1143/jjap.32.4440
Abstract
In (AlAs) k/n (GaAs) l/n (k+l=n) fractional layer superlattice (FLS) growth on the (001) GaAs vicinal surface 2° off toward [1̄10] by metal-organic chemical vapor deposition, using a (AlAs) m (GaAs) n (m, n>3) short period superlattice as the buffer layer very much improve the uniformity of lateral periodicity in the FLS near the FLS/buffer interface compared with using binary (GaAs and AlAs) and ternary AlGaAs as the buffer layers. This is due to the improvement in the uniformity of the terrace width on the surface of a short period superlattice by step-ordering. As a result, a large polarization anisotropy of about 50% is observed in the photoluminescence spectrum for the quantum-wire array structure oriented toward [110] in which a 4-nm-thick (AlAs)1/4(GaAs)3/4 FLS layer is sandwiched by (AlAs)3(GaAs)3 short period superlattice layers. Separated confinement heterostructures consisting of a 12-nm-thick undoped (AlAs)1/4(GaAs)3/4 FLS quantum-wire active layer, doped (AlAs)1(GaAs)2 carrier confinement layers, and doped Al0.6Ga0.4As optical confinement layers are grown. To prevent the disordering of the FLS layer induced by the diffusion of intentionally doped impurity atoms during the growth and the processing, low-diffusive Si and C atoms are used for n- and p-type doping into carrier and optical confinement layers. Lasing operation is obtained by current injection below 195 K for the electrode with simple stripe geometry. The lasing wavelength depends on the orientation of the stripe electrode. The electrode with [110] orientation which is parallel to the quantum wire array has a lasing wavelength of 662 nm, and the [1̄10] orientation which is perpendicular to the array has a lasing wavelength of 667 nm at 10 K.Keywords
This publication has 11 references indexed in Scilit:
- Step ordering during fractional-layer superlattice growth on GaAs(001) vicinal surfaces by metalorganic chemical vapor depositionApplied Physics Letters, 1993
- Equilibrium multiatomic step structure of GaAs(001) vicinal surfaces grown by metalorganic chemical vapor depositionApplied Physics Letters, 1993
- Multi-Atomic Steps on Metalorganic Chemical Vapor Deposition-Grown GaAs Vicinal Surfaces Studied by Atomic Force MicroscopyJapanese Journal of Applied Physics, 1992
- Anisotropy in photoluminescence and absorption spectra of fractional layer superlatticesApplied Physics Letters, 1991
- Terrace width ordering mechanism during epitaxial growth on a slightly tilted substrateJournal of Crystal Growth, 1989
- (AlAs)1/2(GaAs)1/2 fractional-layer superlattices grown on (001) vicinal GaAs substrates by metal–organic chemical vapor depositionJournal of Vacuum Science & Technology B, 1988
- Abrupt p-type doping profile of carbon atomic layer doped GaAs grown by flow-rate modulation epitaxyApplied Physics Letters, 1987
- (AlAs)0.5(GaAs)0.5 fractional-layer superlattices grown on (001) vicinal surfaces by metalorganic chemical vapor depositionApplied Physics Letters, 1987
- Structure of AlAs-GaAs interfaces grown on (100) vicinal surfaces by molecular beam epitaxyApplied Physics Letters, 1984
- Disorder of an AlAs-GaAs superlattice by impurity diffusionApplied Physics Letters, 1981