Depth Profiling of Thin TiSix-Films on Silicon Carbide by SNMS

• 1 August 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 287-288, 231-234
• https://doi.org/10.4028/www.scientific.net/msf.287-288.231

Abstract

Keywords

• METALLIZATION
• OHMIC CONTACT
• SILICON CARBIDE (SIC)
• SNMS