Energy Order Effect of Aluminium Multiple Implantation in 6H-SiC

• 1 February 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 264-268, 697-700
• https://doi.org/10.4028/www.scientific.net/msf.264-268.697

Abstract

Keywords

• ENERGY ORDER
• MULTIPLE ION IMPLANTATION
• RECRYSTALLIZATION RX
• SIMULATION