Near surface modification of silica structure induced by chemical/mechanical polishing
- 12 September 1994
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 29 (17) , 4554-4558
- https://doi.org/10.1007/bf00376278
Abstract
No abstract availableKeywords
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- Evidence for disorder-induced vibrational mode coupling in thin amorphous SiO2 filmsJournal of Applied Physics, 1989
- Infrared spectroscopy of thin silicon dioxide on siliconApplied Physics Letters, 1988
- Caractérisation des surfaces par réflexion rasante de rayons X. Application à l'étude du polissage de quelques verres silicatesRevue de Physique Appliquée, 1980