On-chip piezoresistive stress measurement in three directions
- 31 May 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 27 (1-3) , 801-807
- https://doi.org/10.1016/0924-4247(91)87090-p
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- The Design And Calibration Of A Semiconductor Strain Gauge ArrayPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Use of Piezoresistive Materials in the Measurement of Displacement, Force, and TorqueThe Journal of the Acoustical Society of America, 1957