Effect of particles on buried oxide defects in SIMOX material

Publisher Website

9 December 2002

proceedings article
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 4-5
https://doi.org/10.1109/soi.1991.162828

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Vertical Etching of Silicon at very High Aspect Ratios
Annual Review of Materials Science, 1979