Molecular dynamics simulation of atomic layer etching of silicon

• 1 May 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 13  (3) , 966-971
• https://doi.org/10.1116/1.579659

Abstract

Keywords

• SILICON
• MOLECULAR DYNAMICS SIMULATION
• ATOMIC LAYER
• LAYER ETCHING