High repetition rate operation of a long pulse excimer laser

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Abstract
The high repetition rate operation of a long pulse XeCl laser is demonstrated. The laser is found to work successfully when the reverse voltage mode operation of a spiker-sustainer circuit is employed. This produces the steep voltage rise between the main electrodes resulting in an initiation of a homogeneous discharge and supplies excitation energy from the sustainer circuit with no time delay. These features enable the laser to operate at a repetition rate of greater than 500 Hz with a long pulse duration of 340 ns. An average power of 505 W is achieved.