Classical trajectory calculations of non-linear sputtering: SiCl4 sputtering of a Cu(001) surface using ab initio potentials
- 1 March 1990
- journal article
- Published by Elsevier in Surface Science
- Vol. 227 (3) , 369-389
- https://doi.org/10.1016/s0039-6028(05)80025-1
Abstract
No abstract availableKeywords
This publication has 57 references indexed in Scilit:
- Energy cost to sputter an atom from a surface in keV ion bombardment processesSurface Science, 1987
- Temperature-dependent sputtering of metals and insulatorsApplied Physics A, 1984
- A search for a thermal spike effect in sputtering. I. Temperature dependence of the yield at low-kev, heavy-ion bombardmentRadiation Effects, 1982
- Physical mechanisms of sputteringPhysics Reports, 1981
- Sputtering from elastic-collision spikes in heavy-ion-bombarded metalsJournal of Applied Physics, 1981
- Evidence for spike-effects in low energy ar ion bombardment of Si at room temperatureRadiation Effects, 1978
- Nonlinear effects in heavy-ion sputteringJournal of Applied Physics, 1974
- II. The energy spectrum of ejected atoms during the high energy sputtering of goldPhilosophical Magazine, 1968
- Effect of Elevated Temperatures on Sputtering YieldsPhysical Review B, 1965
- An investigation of thermal spikes by studying the high energy sputtering of metals at elevated temperaturesPhilosophical Magazine, 1965