R.f. plasma deposition of amorphous silicon films from SiCl4-H2
- 1 April 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 67 (1) , 103-108
- https://doi.org/10.1016/0040-6090(80)90293-x
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Chemical effects on the frequencies of Si-H vibrations in amorphous solidsSolid State Communications, 1979
- A new amorphous silicon-based alloy for electronic applicationsNature, 1978
- Plasma preparations of amorphous silicon filmsThin Solid Films, 1978
- Amorphous silicon solar cellApplied Physics Letters, 1976
- Photoconductivity and absorption in amorphous SiJournal of Non-Crystalline Solids, 1973
- Structural, Optical, and Electrical Properties of Amorphous Silicon FilmsPhysical Review B, 1970