Doping of AlGaN Alloys

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Abstract
Nitride-based device structures for electronic and optoelectronic applications usually incor-porate layers of AlxGa1−xN, and n- and p-type doping of these alloys is typically required. Experimental results indicate that doping efficiencies in AlxGa1−xN are lower than in GaN. We address the cause of these doping difficulties, based on results from first-principles density-functional-pseudopotential calculations. For n-type doping we will discuss doping with oxygen, the most common unintentional donor, and with silicon. For oxygen, a DX transition occurs which converts the shallow donor into a negatively charged deep level. We present experimental evidence that oxygen is a DX center in AlxGa1−xN for x>∼0.3. For p-type doping, we find that compensation by nitrogen vacancies becomes increasingly important as the Al content is in-creased. We also find that the ionization energy of the Mg acceptor increases with alloy composition x. To address the limitations on p-type doping we have performed a comprehensive investigation of alternative acceptor impurities; none of the candidates exhibits characteristics that surpass those of Mg in all respects.