Novel sol-gel fabrication of integrated optical waveguides

Publisher Website
Google Scholar
Abstract
The sol-gel method is employed to implement a new, simple and highly versatile fabrication process for integrated optical waveguides on silicon. Photosensitive glass films of several microns thickness are dip-coated and optical components of various configurations through suitable masks are directly inscribed in them by ultraviolet light. Undefined regions are removed by soaking the films in an organic solvent for a few minutes. The developed ridges are then treated and planarized with a cladding layer. Altogether, the procedure is reproducible, and leads to waveguides with low propagation losses, on the order of 0.13 dB/cm.© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

This publication has 0 references indexed in Scilit: