Glass machining by ion sputtering
- 1 November 1972
- journal article
- letter
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 5 (11) , L103-L104
- https://doi.org/10.1088/0022-3727/5/11/103
Abstract
A beam of nitrogen ions has been used to machine a 15 μm deep groove in a 25 μm thick glass plate. The ion-beam machining produced the desired optical finish on the base of the trench.Keywords
This publication has 6 references indexed in Scilit:
- Ion Machining of DiamondJournal of Applied Physics, 1972
- Ion beam polishing of glassMaterials Research Bulletin, 1972
- Cone Formation on Metal Targets during SputteringJournal of Applied Physics, 1971
- Technical Feasibility of Figuring Optical Surfaces by Ion PolishingApplied Optics, 1971
- Ion beam processing of glass surfacesOptics Technology, 1970
- Application of ion sputtering in preparing glasses and their surface layers for electron microscope investigationsJournal of Non-Crystalline Solids, 1970