X-ray lithography with synchrotron radiation

• 1 December 1985
• journal article
• Published by Springer Nature in Zeitschrift für Physik B Condensed Matter
• Vol. 61  (4) , 473-476
• https://doi.org/10.1007/bf01303556

Abstract

Keywords

• CIRCUITS
• SYNCHROTRON RADIATION
• LITHOGRAPHY
• MASK
• STRUCTURES
• PROMISING
• WAFER
• SMALLER