A Circulating Pump for Ultrapure or Toxic Gases
- 1 August 1972
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 43 (8) , 1202-1203
- https://doi.org/10.1063/1.1685877
Abstract
A small, stainless steel, Roots-type pump for gases is described. The pump employs helium leak tight rotary seals which render it suitable for use in ultrahigh vacuum gas handling systems. A throughput (at atmospheric pressure) of 100 liters/min has been measured at 1800 rpm. At higher rpm's, the throughput is correspondingly larger.Keywords
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