Defect distribution in ion-implanted silicon. A Monte Carlo simulation

This publication has 5 references indexed in Scilit:

• Three-Dimensional Monte Carlo Simulations--Part II: Recoil Phenomena
  IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1985
• Tridyn — A TRIM simulation code including dynamic composition changes
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
• Monte Carlo simulation on in-situ annealing of disorder
  Radiation Effects, 1984
• Evolve, a time-dependent monte carlo code to simulate the effects of ion-beam-induced atomic mixing
  Radiation Effects, 1981
• On the net recoil density
  Radiation Effects, 1980