Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon
- 30 September 1992
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 19 (1-4) , 211-214
- https://doi.org/10.1016/0167-9317(92)90425-q
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A Method for Area Saving Planar Isolation Oxides Using Oxidation Protected SidewallsJournal of the Electrochemical Society, 1980