The nature of residual gases during the evaporation of silicon oxide

• 1 December 1967
• journal article
• Published by Elsevier in Vacuum
• Vol. 17  (12) , 649
• https://doi.org/10.1016/0042-207x(67)91054-8

Abstract

Keywords

• RESIDUAL GASES
• SILICON OXIDE
• NATURE OF RESIDUAL
• EVAPORATION OF SILICON