Experimental modeling of inductive discharges
- 1 July 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 11 (4) , 1165-1171
- https://doi.org/10.1116/1.578488
Abstract
The density profile and efficiency of inductively excited helicon wave discharges are found to be sensitive to parameters not usually considered in theoretical treatments. A diverging magnetic field in the antenna region increases the central density by a factor of five and the total plasma production by a factor of two. A carbon or boron nitride aperture limiter also increases the density, but only if placed under a particular part of the antenna. Theoretical modeling can be carried out only after the important variables are found by exploratory measurements such as these.Keywords
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