(Invited) Physics and Device Technology of Silicon on Sapphire

• 1 January 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (S1)
• https://doi.org/10.7567/jjaps.17s1.27

Abstract

Keywords

• INVITED
• DEVICE TECHNOLOGY
• SILICON ON SAPPHIRE
• TECHNOLOGY OF SILICON
• PHYSICS AND DEVICE