EpitaxialPb(Zr,Ti)O3thin films with coexisting tetragonal and rhombohedral phases

Epitaxial ${\mathrm{P}\mathrm{b}(\mathrm{Z}\mathrm{r},\mathrm{}\mathrm{T}\mathrm{i})\mathrm{O}}_3$ thin films having coexisting tetragonal and rhombohedral phases have been successfully fabricated with the film compositions that correspond to the Zr-rich region of the morphotropic phase boundary (MPB). The key to the present success is to quantitatively understand the shift of the MPB under a film stress. The present fabrication has been theoretically justified by superimposing the computed temperature-dependent film stress on the theoretical temperature-stress (T-S) phase diagram and by delineating a probable phase-transition path upon cooling the film from the processing temperature.