Electron-temperature control by movable pins installed in a hollow cathode for discharge plasmas
- 8 February 1993
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 62 (6) , 567-569
- https://doi.org/10.1063/1.108913
Abstract
In order to control electron energy distributions in discharge plasmas, we have developed a new hollow cathode with pins inside. With an increase in the pin length, the electron temperature is observed to decrease continuously by an order of magnitude, being accompanied by a change of local plasma structure, in weakly magnetized low‐pressure Ar dc discharge plasmas.Keywords
This publication has 2 references indexed in Scilit: