Reactive sputtering of platinum in Ar–O2 mixtures
- 1 May 1979
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 16 (3) , 960-961
- https://doi.org/10.1116/1.570121
Abstract
Platinum sputtering in argon–oxygen mixtures is studied utilizing the technique of glow discharge mass spectrometry which involves penning ionization in the plasma and analysis in a quadrupole filter. (AIP)Keywords
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