A novel AFM/STM/SEM system
- 1 September 1994
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 65 (9) , 2853-2854
- https://doi.org/10.1063/1.1144627
Abstract
An atomic force/scanning tunneling (AFM/STM) microscope intended for operation inside a scanning electron microscope(SEM) is described. This AFM/STM/SEM system enables us to image a sample conventionally by SEM as well as to investigate the local surface topography by AFM or STM. This device incorporates a new method for monitoring AFM cantilever deflection that utilizes the focused electron beam of the SEM.Keywords
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