Collision complex model of molecules scattering from corrugated surfaces

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Abstract
A collision complex that gives almost quantitative agreement with a large set of data for inelastic scattering of atoms and molecules from surfaces is presented. In the model, a scattering molecule and a small part of the surface form a collision complex, that decomposes in a unimolecular fashion after statistical redistribution of energy. Both molecular translation and rotation are included in the model, and the surface is represented by a small number of harmonic oscillators. The surface is considered as locally flat at the place of impact, and surface corrugation is represented by a Gaussian distribution of local normal directions. Analytical solutions of simple integrals clearly illustrate the functional dependence on the principal parameters: translational energy, scattering angle, surface temperature, the relative size of the surface directly interacting with a scattering molecule, and the active degrees of freedom. Angular distributions for atoms, diatomic and polyatomic molecules scattering from metals, graphite and liquid surfaces are shown to be in good agreement with experimental results at thermal translational energies, and at least up to 0.5 eV. The model provides a simple and useful way to interpret and inter‐relate experimental results, and makes it possible to evaluate the total information content in experimental data.