Novel development of the weighing method for automatic Czochralski crystal growth of semiconductors
- 1 September 1993
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 132 (1-2) , 1-19
- https://doi.org/10.1016/0022-0248(93)90241-n
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- The weight gain signal in LEC crystal growthJournal of Crystal Growth, 1992
- The dynamics of czochralski growthJournal of Crystal Growth, 1990
- Analysis of the crystal weighing method applied to liquid encapsulated Czochralski growthJournal of Crystal Growth, 1987
- The effect of buoyancy on the weight gain signal in LEC crystal growthJournal of Crystal Growth, 1987
- Control of diameter in Czochralski and related crystal growth techniquesJournal of Crystal Growth, 1977
- The weighing method of automatic Czochralski crystal growthJournal of Crystal Growth, 1977
- The weighing method of automatic Czochralski crystal growthJournal of Crystal Growth, 1977
- Developments in the weighing method of automatic crystal pullingJournal of Crystal Growth, 1974